HE FIVE LLC
Atmospheric Integrated Front End

Proposal and Quotation

For [Customer_Name]

SCOPE OF WORK #

HE FIVE LLC will engineer and design a two-port wafer handling platform as an Integrated Front End (IFE) product for [Customer_Name]. This project will provide a complete integrated 200mm/300mm wafer transport system utilizing PRI robotics and include a mechanical/electrical/software interface to connect to the Mattson production tool. The quoted system price includes Pod Door Openers but does include the FOUP carriers. These components will be enclosed in a modular minienvironment structure to provide ultra-clean wafer handling. The following proposal defines the deliverables and specification for this system. Stated specifications such as required electrical power are preliminary and subject to change. Any customer specification outside this proposal must be presented to PRI OEM Systems Division prior to the placement of a Purchase Order for consideration. Customer specifications may impact the quoted price of the system. A Purchase Order issued referencing this quote accepts all specifications unless otherwise noted.

PRODUCT COMPLIANCE #

Phisical Standards #

The IFE and components comply with the following SEMI physical interface and carrier standards.


SEMI Standard (latest revision)	Description
E1.9	Transport Cassette
E15	Tool Load Port
E22.1	End Effector Exclusion
E72	Specifications and Guide for 300mm Equipment Footprint

Regulatory Compliance #

The IFE is designed and manufactured to be CE and S2-93 compliant. HE FIVE LLC is currently in the process of recertifying the front end product line. Depending on schedule, the delivered system may not have certification.


Standard	Description
CE Mark Compliance 89/336/IEC 89/392/EEC 73/23/EEC	Conformite Europeene (CE Mark Compliance) EMC Directive, Machinery Directive, Low Voltage Directive (System testing and conformance to be completed by customer when IFE is attached to OEM tool)
ANSI / NFPA 70, 79	National Fire Protection Association, Electrical Standard for Industrial Machinery
OSHA	Occupational Safety and Health Agency
ISO-14644-1	Cleanrooms and Associated Controlled Environments- Part 1: Classification of Airborne Particles
SEMI S1	Safety Guidelines for Visual Hazards Alert
SEMI S2	Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S8	Safety Guidelines for Ergonomics / Human Factors Engineering of Semiconductor Manufacturing Equipment

Industry Guidelines #


Organization	Document
International Sematech	I300I Factory Guidelines: Version 4.2
International Sematech	I300 Factory Guideline Compliance: Factory Integration Maturity Assessment for 300 mm Production Equipment: Version 4.0
International Sematech	Integrated Minienvironment Design Best Practices
Intel Corporation	Intel Required Physical Interfaces and SEMI Standards for 300 mm Process & Metrology Equipment, Rev. 7/12/99
J300	Standard Light Stack Specification

SYSTEM CONFIGURATION #

The IFE series Front End is a modular platform, constructed of sub-modules and options, which can be configured, expanded and customized to meet the specific needs of individual process tools. The proposed system would be comprised of the following components and features.

WAFER HANDLING COMPONENTS #

AT300 Robot, Dual Arm #

Specs:


aaa	aaa
bbb	bbb
—	—

HF-PA300 Prealigner, 3-axis #

Specs:


aaa	aaa
bbb	bbb
—	—

Flashing prealigner firmware #

1. Download #

Download installer for STM32CubeProgrammer from here.

2. Run installer #

Step 1 of 8 #

Click Next

Step 2 of 8 #

Click Next

Step 3 of 8 #

Click I accept the terms of the ….
Click Next

Step 4 of 8 #

Click Next
Click OK

Step 5 of 8 #

Click Next

Step 6 of 8 #

Click Next
If this Windows Security warning appears: Click Install this driver software anyway ..
Check off on Always trust software … & Click Install
Repeat this for all drivers from STMICROELECTRONICS
Click Finish
Click Next

Step 7 of 8 #

Click Next

Step 8 of 8 #

Click Done

3. Connect programmer #

Connect ST-Link programmer USB PC

4. Flash device #

Flash with STM32CubeProgrammer

Run STM32CubeProgrammer*
Select STLINK
Click reload button
If device is found serial number will be displayed
Click Connect

If error “No debug probe detected.” pops up,
click Ok and check Connect ST-Link programmer USB PC
Successful connection will display Connected and Target information
Switch to Erasing & Programming panel
Click on Browse and select firmware file
Put a mark on Skip flash erase before programming
Put a mark on Verify programming
Click on Start Programming and wait
Successful verification will display this message click OK
Download complete click OK
Disconnect from ST-LINK click Disconnect
Close STM32CubeProgrammer
Power cycle (restart) Prealigner controller

5. Prepare PuTTY connection #

Power cycle (restart) Prealigner controller
Connect Prealigner controller to PC
Open Windows Device Manager
Expand Ports (COM & LPT)
Disconnect Prealigner controller from PC and memorize which port disappear
Connect Prealigner controller to PC and verify that (COM ) port will be listed again*
Run PuTTY
Select Connection type Serial
Enter memorized Serial line COMx and Speed 115200
Select Terminal panel
Put check as shown on the picture
Select Session panel
Type prealigner in Saved Sessions and click Save
Click Open to establish Connection with Prealigner
Verify connection type VER in terminal

Note: If prealigner replies with ?, type ver again in terminal.

6. Initial Setup #

Setup Prealigner for the first time or Reset all saved Prealigner settings

Type _APPD in terminal to save default settings
```
>_appd  
>
```

Type -CONFIG to verify correct configuration

>-config
{
	"DEVICE_PARAM": {
	... 
	...
	},  
	"CONSOLE": {
	...
	...
	},  
	"AXIS_PARAM": {
		"T": {
			...
			...
		},
		"R": {
			...
			...
		}
	}
}

7. Connect MCDN #

Type ARM 2 to activate human readable mode
```
>arm 2  
>
```
Type MCDN 9 to establish communication with MCDN
```
>mcdn 9  
Connected with 1250000  
>
```
Type POW to enable servo power
```
>pow  
>
```
Type SON to enable servo
```
>son  
>
```

Troubleshooting: MCDN communication check

Note: If you type SON before executing MCDN 9 and POW, it will be execute following sequence of commands:
mcdn 9
pow
son

8. Verify I/O #

Verify Inputs and Output functionality

Output command out #

Type OUT , which will print Output states

>out  
0. ValChuck  : 1  
1. ValPins   : 1  
2. MotPinsUp : 1  
>

Format:

number. name : state ( 1-enable / 0-disable )

number	name	description	state 1 (enable)	state 0 (disable)
0	ValChuck	Chuck vacuum valve	Valve open	Valve closed
1	ValPins	Pins vacuum valve	Valve open	Valve closed
2	MotPinsUp	Pins up/down	Pins Up	Pins down

Enable/disable output type OUT [Output Number] [ 1 = enable / 0 = disable ]
- Example: enable ValChuck (Chuck vacuum):
```
>out 0 1  
>  
```
- Example: disable (lower) MotPinsUp (Pins up/down) if they are enable (pins up):
```
>out 2 0  
>  
```
Check that we have vacuum line to prealigner and make sure that we have vacuum.
Check MCDN communication is enable and working without errors. MCDN communication check
Enable/Disable ValChuck, ValPins and manually check correct vacuum present/not present
Enable/Disable MotPinsUp and visually check correct pins up/pins down

Input command inp #

Type INP , which will print Input states

>inp  
0. SenChuck : 0  
1. SenPins  : 0  
2. FlgPins  : 0  
3. FlgHomeR : 0  
>

Format:

number. name : state ( 1-active / 0-inactive )

number	name	description	state 1 (active)	state 0 (inactive)
0	SenChuck	Chuck vacuum sensor	active	inactive
1	SenPins	Pins vacuum sensor	active	inactive
2	FlgPins	Pins Moving	Pins Flag between up/down sensors ( Pins in motion )	Pins Flag cover up or down sensor ( Pins not moving)
3	FlgHomeR	Home R flag	Home R Flag covers the sensor	Home R Flag doesn’t cover the sensor

Adjust Chuck and Pins vacuum sensor using the trimers
Note: Make sure that vacuum line is connected to and we have vacuum.
The leds on the boards should correspond the actual state
Type INP and check that we have matching state in the firmware too
Cover Home R sensor manually

Type INP and check that we have matching state in the firmware too

>inp  
1. SenChuck :   
2. SenPins  :   
3. FlgPins  :   
4. FlgHomeR : 1  
>

Uncover Home R sensor